wb1442

Coursecode: wb1442 Coursename: Introduction to Microsystems ECTS creditpoints: 3
Faculty of Mechanical Engineering and Marine Technology
Lecturer(s): Goosen, J.F.L. , Guest lecturers	Tel.: 015-27 86500
Catalog data: Microsystems technology, MEMS, micromachining, sensors and actuators, integrated optics, fabrication technolgy.	Course year: MSc 1st year Period: 1A / 1B Hours p/w: 2 Other hours: Assessment: written Assessm.period(s): 1B (see academic calendar )
Prerequisites: --
Follow up: --
Detailed description of topics: This lecture gives and introduction to Microsystems with typical sizes up to 1mm and feature sizes of a few micrometers. Overview of applications such as sensors, actuators, structural components and signal conversion. An overview of manufacture techniques, reliability, modeling, etc. relevant to microsystem design. Furthermore the physics involved in such small systems and how this differs from systems of a more traditional scale.
Course material: Handouts during lecture
References from literature:
Remarks (specific information about assesment, entry requirements, etc.):
Goals: The course will build an awareness and feel for Microsystems, their application, manufacture and the design aspects of these microscopic systems.
Computer use:
Laboratory project(s):
Design content: Special design requirements of microsystems.
Percentage of design: 50%