last modified: 07/03/2006

Course code: MS4111

Course name: Thin Film Materials

This concerns a Course

In the program of  MSc MSE                                         and of 

EC (European Credits): 3 (1 EC concerns a work load of 28 hours)

Faculty of Mechanical, Maritime and Materials Engineering

Department of MSE

Lecturer 1: Prof.dr. G.C.A.M.Janssen

Tel.:  015 - 27 81684 / e-mail g.c.a.m.janssen@tnw.tudelft.nl

Lecturer 2:      

Lecturer 3:      

Catalog data:

film, thin film, films, thin films, stress in films, film  stress, film growth, film deposition, deposition, coatings, low friction coatings, micro electronics, MEMS

Course year:

MSc 1st year

Course language:

English

 

In case of Dutch: Please contact the lecturer about an English alternative, whenever needed.

Semester:

2B

Hours per week:

4

Other hours:

     

Assessment:

Oral exam

Assessment period:

2B

(see academic calendar)

 

Prerequisites (course codes):

     

Follow up (course codes):

     

Detailed description of topics:

The course "Thin Film Materials" is based on the first chapter of the book "Thin Film Materials" by L.B. Freund and S. Suresh. In that chapter a number of important subjects relating to thin films and coatings is introduced. The course will follow the chapter closely. Also the primary sources quoted by Freund and Suresh will be presented and discussed. The subjects are:

1. A classification of thin film configurations

2. Film deposition methods

3. Modes of film growth by vapour deposition

4. Film microstructures

5. Processing of microelectronic structures

6. Processing of MEMS structures

7. Origins of film stress

8. Growth stress in polycrystalline films

9. Consequenses of stress in films

 

Course material:

  • Chapter 2 of "Thin Film Materials" by L.B.Freund and S.Suresh, pp 1-85.
  • Key references quoted by Freund and Suresh will be anounced on blackboard prior to the course

References from literature:

  •      

Remarks assessment, entry requirements, etc.:

     

Learning goals:

The student is able to discuss the relations deposition parameters - microstructure and microstucture - properties.

 

More specifically, the student is able to:

1. reproduce the various vacuum deposition technologies

2. apply thermodynamics to surface tension and adsorption

3. explain nucleation and film growth in UHV

4. describe the various techniques used for surface characterization

5. reproduce, and comment on the prevailing ideas on hardness of coatings

6. list several low friction coatings and the measurements on these coatings

7. describe the fabrication techniques used in micro-electronics and MEMS and explain the needs and limitations

    of these techniques

8. reproduce the prevailing theories on size effects in thin films

9. reproduce the prevailing theories on stress in thin films and is able to discuss the research literature on stress  

    in thin films

Computer use:

for information retrieval

Laboratory project(s):

visit to the thin films deposition lab.

Design content:

none