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Coursecode: wb1442
Coursename: Introduction to Microsystems
ECTS creditpoints: 3
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Faculty of Mechanical Engineering and Marine Technology |
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Lecturer(s): Goosen, J.F.L.
, Guest lecturers |
Tel.: 015-27 86500
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Catalog data:
Microsystems technology, MEMS, micromachining, sensors and actuators, integrated
optics, fabrication technolgy. |
Course year: MSc 1st year
Period: 1A / 1B
Hours p/w: 2
Other hours:
Assessment: written
Assessm.period(s): 1B
(see academic calendar
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Prerequisites: -- |
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Follow up: -- |
Detailed description of topics:
This lecture gives and introduction to
Microsystems with typical sizes up to 1mm and feature sizes of a few micrometers.
Overview of applications such as sensors, actuators, structural components
and signal conversion. An overview of manufacture techniques, reliability,
modeling, etc. relevant to microsystem design. Furthermore the physics
involved in such small systems and how this differs from systems of a more
traditional scale. |
Course material:
Handouts during lecture
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References from literature: |
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Remarks (specific information about assesment, entry requirements, etc.): |
Goals:
The student must be able to:
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list
the applications of micro systems and describe their weak and strong
points
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use
scaling laws to calculate and predict behaviour of specific micro
systems and compare and evaluate different concepts and systems when
subjected to miniaturization
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describe several basic mechanical, electrical, magnetic, optical,
thermal and fluidic principles, calculate how some these effects scale
and explain how they are used in micro systems
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list
and describe the basic manufacturing techniques used for micro systems
and their specific strengths and weaknesses
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design a basic manufacturing sequence resulting in a specific structure
using photolithography and micromachining process steps
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describe the problems involved in the assembly of these very small
systems and explain how some of these can be solved
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list
the functions of a package, several packaging solutions and describe the
problems associated with packaging related to specific micro system
needs
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describe the difficulties in testing and measuring of micro systems and
the special equipment and structures involved in this
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list
and describe some of the most common failure mechanisms of micro systems
and how they can be influenced
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describe the difficulties involved in the design of micro systems and
list the tools available to assist in this process
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compare different possibilities of physical principles, manufacturing
techniques, packaging options, etc. in a specific micro system and/or
situation and formulate a choice
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Computer use:
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Laboratory project(s):
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Design content:
Special design requirements of microsystems. |
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Percentage of design: 50% |